Invention Grant
- Patent Title: Resonant-bridge two axis microaccelerometer
- Patent Title (中): 谐振桥两轴微加速度计
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Application No.: US304057Application Date: 1989-01-30
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Publication No.: US4901570APublication Date: 1990-02-20
- Inventor: Shih-Chia Chang , David B. Hicks , Michael W. Putty
- Applicant: Shih-Chia Chang , David B. Hicks , Michael W. Putty
- Applicant Address: MI Detroit
- Assignee: General Motors Corporation
- Current Assignee: General Motors Corporation
- Current Assignee Address: MI Detroit
- Main IPC: G01P15/02
- IPC: G01P15/02 ; G01P15/097 ; G01P15/10 ; G01P15/18
Abstract:
A resonant bridge two-axis microaccelerometer is disclosed comprising polysilicon resonant bridges orthogonally attached to a silicon proof mass, such that the silicon proof mass is suspended by the resonant bridges. Acceleration in the plane of the substrate causes differential axial loads on the opposing microbridges in each pair, thereby shifting their resonant frequencies. The acceleration component aligned with a pair is measured by the difference in resonant frequencies.
Public/Granted literature
- US6157122A Color cathode ray tube with coma reduced Public/Granted day:2000-12-05
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