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US4901570A Resonant-bridge two axis microaccelerometer 失效
谐振桥两轴微加速度计

Resonant-bridge two axis microaccelerometer
Abstract:
A resonant bridge two-axis microaccelerometer is disclosed comprising polysilicon resonant bridges orthogonally attached to a silicon proof mass, such that the silicon proof mass is suspended by the resonant bridges. Acceleration in the plane of the substrate causes differential axial loads on the opposing microbridges in each pair, thereby shifting their resonant frequencies. The acceleration component aligned with a pair is measured by the difference in resonant frequencies.
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