发明授权
- 专利标题: Method and apparatus for forming thin film
- 专利标题(中): 用于形成薄膜的方法和装置
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申请号: US47328申请日: 1987-05-08
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公开(公告)号: US4901669A公开(公告)日: 1990-02-20
- 发明人: Takashi Yamamoto , Shozo Kaneko , Tadashi Gengo , Joji Ichinari , Hiroshi Fujiyama , Yoshio Kayumi , Masayoshi Murata
- 申请人: Takashi Yamamoto , Shozo Kaneko , Tadashi Gengo , Joji Ichinari , Hiroshi Fujiyama , Yoshio Kayumi , Masayoshi Murata
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Jukogyo Kabushiki Kaisha
- 当前专利权人: Mitsubishi Jukogyo Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX61-106313 19860509; JPX61-106314 19860509; JPX61-106315 19860509; JPX61-160217 19860708; JPX61-183902 19860805
- 主分类号: C23C16/517
- IPC分类号: C23C16/517 ; H01L21/205
摘要:
The present invention is directed to a method for forming a thin film on a substrate by the use of a glow discharge plasma which comprises generating a magnetic field in a direction which crosses an electric field for discharge at right angles and fluctuating the magnetic field. The present invention is also directed to an apparatus for practicing the above method, which apparatus is composed of a reaction vessel, means for reducing the pressure in the reaction vessel and means for introducing the feed of reaction gases to the reaction vessel, electrodes for discharge disposed face to face in the reaction vessel, a power source from which a voltage for causing a glow discharge is fed to the electrodes for discharge, a coil surrounding the electrodes for discharge, for generating a magnetic field in a direction crossing at right angles to an electric field generated between the electrodes for discharge, and an AC power source for generating a magnetic field fed to the coil, whereby a thin film is formed on a base plate supported outside the range of the discharge electric field and in parallel with the direction of the electric field.
公开/授权文献
- US4280079A Driving system for a plasma display panel 公开/授权日:1981-07-21