发明授权
- 专利标题: Device including a substrate-supported optical waveguide, and method of manufacture
- 专利标题(中): 包括基板支持的光波导的装置及其制造方法
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申请号: US163687申请日: 1988-03-03
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公开(公告)号: US4902086A公开(公告)日: 1990-02-20
- 发明人: Charles H. Henry , Roland A. Levy
- 申请人: Charles H. Henry , Roland A. Levy
- 申请人地址: NJ Murray Hill
- 专利权人: AT&T Bell Laboratories
- 当前专利权人: AT&T Bell Laboratories
- 当前专利权人地址: NJ Murray Hill
- 主分类号: G02B6/122
- IPC分类号: G02B6/122 ; G02B6/10 ; G02B6/12 ; G02B6/125 ; G02B6/132
摘要:
In the manufacture of optical devices such as, e.g., optical communications assemblies and optical gyroscopes, low-loss substrate-supported optical waveguides are desired. Such waveguides can be obtained by patterning a layer of deposited waveguide material and, in the interest of minimizing loss as may be due to processing-induced surface roughness, waveguides as patterned preferably undergo a heat treatment which results in surface smoothing and in rounding of the waveguide cross section. Furthermore, in the interest of avoiding re-entrant corners between substrate and waveguide, a wetting layer may be applied to the waveguide prior to heat treatment.