发明授权
- 专利标题: Laser oscillator device
- 专利标题(中): 激光振荡器装置
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申请号: US283478申请日: 1988-12-02
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公开(公告)号: US4921357A公开(公告)日: 1990-05-01
- 发明人: Norio Karube , Akira Egawa , Etsuo Yamazaki , Nobuaki Iehisa , Mitsuo Manabe
- 申请人: Norio Karube , Akira Egawa , Etsuo Yamazaki , Nobuaki Iehisa , Mitsuo Manabe
- 申请人地址: JPX Minamitsuru
- 专利权人: Fanuc Ltd.
- 当前专利权人: Fanuc Ltd.
- 当前专利权人地址: JPX Minamitsuru
- 优先权: JPX62-107826 19870430
- 主分类号: H01S3/097
- IPC分类号: H01S3/097 ; H01S3/0975
摘要:
A laser oscillator device applies a high-frequency voltage to a plurality of discharge regions through a dielectric for producing a high-frequency discharge for laser pumping. The laser oscillator device includes a DC power supply (16), and a high-frequency power supply (18, 19, 20, 21) for converting a DC voltage into a high-frequency voltage. The DC power supply (16) and the high-frequency power supply (18, 19, 20, 21) are coupled to each other by a filter (30). The filter (30) prevents a high-frequency component from being fed back from the high-frequency power supply (18, 19, 20, 21) to prevent the laser oscillator device from operating unstably due to parasitic oscillation. Other arrangements are disclosed for preventing interference between the high-frequency power supply and the DC power supply.
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