发明授权
- 专利标题: Apparatus and method for optical measuring and imaging of electrical potentials
- 专利标题(中): 用于光电测量和电位成像的装置和方法
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申请号: US155103申请日: 1988-02-11
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公开(公告)号: US4926043A公开(公告)日: 1990-05-15
- 发明人: Gerald Solkner
- 申请人: Gerald Solkner
- 申请人地址: DEX Berlin and Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Berlin and Munich
- 优先权: DEX3710662 19870331
- 主分类号: G01R15/24
- IPC分类号: G01R15/24 ; G01N21/21 ; G01N21/956 ; G01R19/00
摘要:
An apparatus and method include using an electro-optic crystal lying on a component surface, the crystal being coated with a cooperating electrode which is transparent to a sampling laser beam to optically measure and image electrical potentials and voltage levels independently of topographical influences.
公开/授权文献
- US4353670A Machining tool 公开/授权日:1982-10-12
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