发明授权
- 专利标题： Observing a surface using a charged particle beam
- 专利标题（中）： 使用带电粒子束观察表面
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申请号： US233612申请日： 1988-07-25
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公开(公告)号： US4928010A公开(公告)日： 1990-05-22
- 发明人: Kenichi Saito , Kou Wada , Masahiro Yoshizawa
- 申请人： Kenichi Saito , Kou Wada , Masahiro Yoshizawa
- 专利权人： Nippon Telegraph and Telephone Corp.
- 当前专利权人： Nippon Telegraph and Telephone Corp.
- 优先权： JPX61-283868 19861128; JPX62-263968 19871021
- 主分类号： H01J37/28
- IPC分类号： H01J37/28
摘要：
An arrangement for observing a surface using a charged particle beam irradiated on the surface of a specimen and detecting secondary electrons emitted. An exciting device produces a strong magnetic field substantially perpendicular to the surface of the specimen. Secondary electrons are extracted from a bottom or side surface of a recess, such as a through hole formed in the surface of the specimen, by an interaction between the emitted secondary electrons and the strong magnetic field. A focusing lens is arranged so as to focus the charged particles at a point on the specimen, even in the presence of a strong field. Thus, a secondary electron image on the surface of the specimen can be sharply obtained to thereby observe a secondary electron image at the bottom surface or side surface of the through hole.
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