发明授权
US4929041A Cathodoluminescence system for use in a scanning electron microscope
including means for controlling optical fiber aperture
失效
用于扫描电子显微镜的阴极发光系统,包括用于控制光纤孔径的装置
- 专利标题: Cathodoluminescence system for use in a scanning electron microscope including means for controlling optical fiber aperture
- 专利标题(中): 用于扫描电子显微镜的阴极发光系统,包括用于控制光纤孔径的装置
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申请号: US294234申请日: 1989-01-09
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公开(公告)号: US4929041A公开(公告)日: 1990-05-29
- 发明人: Kerry J. Vahala , Michael E. Hoenk
- 申请人: Kerry J. Vahala , Michael E. Hoenk
- 申请人地址: TX Brookshire
- 专利权人: Johnston Pump/General Valve, Inc.
- 当前专利权人: Johnston Pump/General Valve, Inc.
- 当前专利权人地址: TX Brookshire
- 主分类号: G01Q10/04
- IPC分类号: G01Q10/04 ; G01Q30/02 ; H01J37/244
摘要:
An improved cathodoluminescence light collection system for use in electron microscopes provides an optical fiber, the facet or aperture of which is positioned adjacent the sample. The cathodoluminescence light, collected by the optical fiber in this manner, may be used to provide spectrally resolved cathodoluminescence images of the sample as well as local cathodoluminescence spectra of the type available in prior art cathodoluminescence light collection systems, but without incurring the numerous disadvantages of such prior art light collection systems. The present invention is relatively inexpensive, far easier to maintain because it does not require use of a mirror and, it is more compact in size thereby making it compatible with the physical limitations of more electron microscopes.
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