A ferroelectric liquid crystal device comprises a pair of substrates each provided with an electrode, and a ferroelectric liquid crystal disposed between the pair of substrates. At least one of the pair of substrates has thereon an inorganic oxide layer which has a resistance of 1-10.sup.5 .OMEGA./cm.sup.2 in the direction of the layer thickness and preferably has a pencil hardness of 4H or harder. Because of the provision of the inorganic oxide layer, the ferroelectric liquid crystal device shows good bistability on switching under application of pulse electric fields and yet free of short circuit between the upper and lower electrodes.