发明授权
US4934767A Semiconductor wafer carrier input/output drawer 失效
半导体晶圆载体输入/输出抽屉

Semiconductor wafer carrier input/output drawer
摘要:
Plastic cassettes carrying semiconductor wafers are loaded into and/or unloaded from an extended open drawer. The drawer is retractable to a closed position in a frame where the cassettes may be removed from or returned to the drawer by a programmable elevator. The frame may have several drawers and cassettes may be safely loaded into or unloaded from the open drawer while cassettes are being removed from or returned to a closed drawer.
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