发明授权
- 专利标题: Semiconductor wafer carrier input/output drawer
- 专利标题(中): 半导体晶圆载体输入/输出抽屉
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申请号: US863960申请日: 1986-05-16
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公开(公告)号: US4934767A公开(公告)日: 1990-06-19
- 发明人: Hazen L. Hoyt, III , Jon C. Goldman , William R. Mello
- 申请人: Hazen L. Hoyt, III , Jon C. Goldman , William R. Mello
- 申请人地址: CA San Jose
- 专利权人: Thermco Systems, Inc.
- 当前专利权人: Thermco Systems, Inc.
- 当前专利权人地址: CA San Jose
- 主分类号: B65G1/02
- IPC分类号: B65G1/02 ; H01L21/673
摘要:
Plastic cassettes carrying semiconductor wafers are loaded into and/or unloaded from an extended open drawer. The drawer is retractable to a closed position in a frame where the cassettes may be removed from or returned to the drawer by a programmable elevator. The frame may have several drawers and cassettes may be safely loaded into or unloaded from the open drawer while cassettes are being removed from or returned to a closed drawer.
公开/授权文献
- US5792273A Secondary edge reflector for horizontal reactor 公开/授权日:1998-08-11