发明授权
- 专利标题： System for measuring a topographical feature on a specimen
- 专利标题（中）： 用于测量样本上的地形特征的系统
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申请号： US312619申请日： 1989-02-17
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公开(公告)号： US4941980A公开(公告)日： 1990-07-17
- 发明人: Uriel Halavee , Israel Niv , Tzila Schwarzkopf
- 申请人： Uriel Halavee , Israel Niv , Tzila Schwarzkopf
- 申请人地址： CA Santa Clara
- 专利权人： Opal, Inc.
- 当前专利权人： Opal, Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： H01J37/28
- IPC分类号： H01J37/28
摘要：
A system for measuring a topographical feature on a specimen including apparatus for scanning an electron beam across the feature at high speed, first and second electron detector apparatus organized in pairs, apparatus for signal processing of a first signal received from the first electron detector apparatus thereby to identify elements of a cross-sectional profile of the feature, apparatus for signal processing of a second signal received from the second electron detector apparatus generally separately from the signal processing of the first signal thereby to identify elements of a cross-sectional profile of the feature, and apparatus for incorporating the elements identified from the first electron detector apparatus and the elements identified from the second electron detector apparatus thereby to produce a composite picture of the feature.
公开/授权文献
- US5550121A Aminoalkylpyrrolidinylthiocarbapenem derivatives 公开/授权日：1996-08-27
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