发明授权
- 专利标题: Device for ultrasonic atomization of a liquid medium
- 专利标题(中): 液体介质超声雾化装置
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申请号: US247106申请日: 1988-09-15
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公开(公告)号: US4981425A公开(公告)日: 1991-01-01
- 发明人: Ernst-Gunter Lierke , Klaus Luhmann , Sigurd Jonsson , Michael Hohmann , Lothar Bendig , Frieder Hofmann , Reinhard Gaa
- 申请人: Ernst-Gunter Lierke , Klaus Luhmann , Sigurd Jonsson , Michael Hohmann , Lothar Bendig , Frieder Hofmann , Reinhard Gaa
- 申请人地址: DEX Frankfurt am Main
- 专利权人: Battelle-Institut E.V.
- 当前专利权人: Battelle-Institut E.V.
- 当前专利权人地址: DEX Frankfurt am Main
- 优先权: DEX3732325 19870925
- 主分类号: B06B1/02
- IPC分类号: B06B1/02 ; B05B17/06 ; B22F9/08
摘要:
Device which serves to atomize a solid or liquid medium with the aid of a standing ultrasonic wave that is generated between two ultrasonic transmitters. This allows one to tune the standing ultrasonic wave automatically when the temperature of the medium or other process parameters should change.
公开/授权文献
- US6131589A Accurate positioning of a wafer 公开/授权日:2000-10-17