Invention Grant
- Patent Title: Beam position sensor with time shared normalizing circuit
- Patent Title (中): 光束位置传感器,具有时间共享归一化电路
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Application No.: US452723Application Date: 1989-12-19
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Publication No.: US4982078APublication Date: 1991-01-01
- Inventor: John P. Ekstrand
- Applicant: John P. Ekstrand
- Applicant Address: CA Mountain View
- Assignee: Spectra-Physics, Inc.
- Current Assignee: Spectra-Physics, Inc.
- Current Assignee Address: CA Mountain View
- Main IPC: G01D5/26
- IPC: G01D5/26
Abstract:
A system for detecting position of a light beam propagating along a beam path utilizes a single variable gain preamplifier in a time shared mode for each of the outputs of a four quadrant position sensors. A detector mounted in the beam path and having a reference point, generates a plurality of signals indicating deviation from the reference in plural directions. A multiplexer is connected to the detector, and combines the plural signals into a time multiplexed output. A variable gain preamplifier normalizes the signals in the time multiplexed output to generate the normalized output. The normalized output is then supplied to a logic circuit for processing the normalized output to generate a position signal indicating the position of the light beam.
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