A photoreceptor for electrophotography, comprising: a photoconductive layer substantially composed of amorphous silicon, and first, second and third surface layers substantially composed of amorphous silicon added with nitrogen atom, those layers being formed on a support. The thickness d.sub.1, d.sub.2 and d.sub.3 of the first, second and third surface layers satisfies the following relation: d.sub.2 >d.sub.1 and d.sub.2 >d.sub.3, and the nitrogen concentrations c.sub.1, c.sub.2 and c.sub.3 of said first, second and third surface layers satisfy the following relation: c.sub.3 >c.sub.2 >c.sub.1.