发明授权
- 专利标题: Viewing system for surface profiler
- 专利标题(中): 表面分析仪查看系统
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申请号: US389430申请日: 1989-08-04
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公开(公告)号: US5017012A公开(公告)日: 1991-05-21
- 发明人: Edward J. Merritt, Jr. , Joan E. Samuels , Joseph R. Bietry
- 申请人: Edward J. Merritt, Jr. , Joan E. Samuels , Joseph R. Bietry
- 申请人地址: NY Rochester
- 专利权人: Chapman Instruments, Inc.
- 当前专利权人: Chapman Instruments, Inc.
- 当前专利权人地址: NY Rochester
- 主分类号: G01B11/30
- IPC分类号: G01B11/30
摘要:
A previewing profiler includes apparatus to scan the surface of an object and to provide a display relating to the smoothness of the surface at a microscopic level. The system includes providing a polarized collimated laser beam through a Nomarski type prism and focusing the resulting beams on the surface to be scanned. The system further includes a user operable rotatable mirror which may be inserted, upon operator command, between the laser and Nomarski prism, which mirror is designed to leak a small percentage of the laser light. Another source of noncollimated polarized light, provided through a condensing lens, is provided to the rotatable mirror to be directed along the same path through the Nomarski prism and to be focused at a point above the surface being scanned, thereby providing a substantially larger illuminated area on the surface. The reflected light from both the laser beam and additional noncollimated light is focused on a CCD array and then displayed on a display. This permits the user to view the area to be profiled, including the profile line, prior to operating the profiler.
公开/授权文献
- US4468562A Dosimeter for photometric applications 公开/授权日:1984-08-28
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