发明授权
US5017798A Surface examining apparatus for detecting the presence of foreign
particles on two or more surfaces
失效
表面检查装置，用于检测两个或多个表面上的外来颗粒的存在
- 专利标题： Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces
- 专利标题（中）： 表面检查装置，用于检测两个或多个表面上的外来颗粒的存在
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申请号： US406090申请日： 1989-09-12
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公开(公告)号： US5017798A公开(公告)日： 1991-05-21
- 发明人: Eiichi Murakami , Michio Kohno , Akiyoshi Suzuki
- 申请人： Eiichi Murakami , Michio Kohno , Akiyoshi Suzuki
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX61-03062 19860214; JPX61-060871 19860320; JPX61-118862 19860523; JPX61-118863 19860523
- 主分类号： G01N21/94
- IPC分类号： G01N21/94 ; G01N21/956
摘要：
An apparatus usable with an object having surfaces, for examining the states of the surfaces, includes on irradiating system for irradiating the surfaces of the object with a single light beam, and a plurality of light-receiving systems provided in association with the surfaces of the object, respectively, the plural light-receiving systems being arranged to receive light scatteringly reflected from the surfaces of the object, respectively, and to produce outputs corresponding to the states of the surfaces of the object, respectively.
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