发明授权
- 专利标题： Method and device for the operation of a workpiece-contacting probe head of the switching type
- 专利标题（中）： 用于操作切换式工件接触探头的方法和装置
-
申请号： US555909申请日： 1990-07-20
-
公开(公告)号： US5018280A公开(公告)日： 1991-05-28
- 发明人: Eckhard Enderle , Hans-Peter Aehnelt , Karl-Eugen Aubele , Michael Wirth
- 申请人： Eckhard Enderle , Hans-Peter Aehnelt , Karl-Eugen Aubele , Michael Wirth
- 申请人地址： DEX Oberkochen
- 专利权人： Carl-Zeiss-Stiftung, Heidenheim/Brenz
- 当前专利权人： Carl-Zeiss-Stiftung, Heidenheim/Brenz
- 当前专利权人地址： DEX Oberkochen
- 优先权： DEX3824548 19880720
- 主分类号： G01B21/20
- IPC分类号： G01B21/20 ; G01B11/00 ; G01B21/00
摘要：
To overcome friction in the mount of the switching-type probe head, a probe (5/6) displaceably mounted therein is transiently excited in oscillation for a predetermined time after each contacting process. The same piezoelectric element (17) as that which produces the initial work-contact signal in the probe head can additionally be used to stimulate the oscillations.
公开/授权文献
- US5798198A Non-stoichiometric lithium ferrite carrier 公开/授权日：1998-08-25
信息查询
