发明授权
- 专利标题: Lapping plate for a lapping and polishing machine
- 专利标题(中): 研磨抛光机研磨板
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申请号: US606807申请日: 1990-10-09
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公开(公告)号: US5036625A公开(公告)日: 1991-08-06
- 发明人: Anatoly Gosis
- 申请人: Anatoly Gosis
- 专利权人: GENERAL SIGNAL Corp A CORP OF NEW YORK,Speedfam Corp
- 当前专利权人: GENERAL SIGNAL Corp A CORP OF NEW YORK,Speedfam Corp
- 主分类号: B24B37/08
- IPC分类号: B24B37/08 ; B24B37/10 ; B24B37/34 ; B24B57/02
摘要:
This invention relates to a complete double lap lapping and polishing machine particularly to an apparatus designed to finish to a required thickness and/or finished polish workpiece such as thin silicon and/or ceramic wafers. The machine includes improvements in all of it's substructure components, including it's overall housing design, planetary gear drive, fluid cooling systems, positioning and locking of the upper lap plate in an inoperative position, an automatic thickness or sizing control, rotary union with automatic fluid liquid indicator and a slurry delivery and recovery system, all of which result in a more automated efficient use of the machine so as to produce a closer tolerance finished product.
公开/授权文献
- US5747301A D-sorbitol dehydrogenase 公开/授权日:1998-05-05
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