发明授权
- 专利标题： High frequency ultrasonic system
- 专利标题（中）： 高频超声波系统
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申请号： US493808申请日： 1990-03-15
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公开(公告)号： US5038808A公开(公告)日： 1991-08-13
- 发明人: Peter Hammond , Kevin S. Schumacher
- 申请人： Peter Hammond , Kevin S. Schumacher
- 申请人地址： NY Chestnut Ridge
- 专利权人： S&K Products International, Inc.
- 当前专利权人： S&K Products International, Inc.
- 当前专利权人地址： NY Chestnut Ridge
- 主分类号： B08B3/00
- IPC分类号： B08B3/00 ; B08B3/12 ; H01L21/00 ; H01L21/304
摘要：
A high frequency ultrasonic system for sonically removing particles from substrates or wafers held in a carrier or carriers in a tank of liquid, such as DI water. A frame encompasses the tank and supports the transducer housing at an angle with respect to the tank bottom and also provides for horizontal movement between the sides of the tank. A transducer housing supports at least one transducer within the transducer housing. The transducer housing can be supported and moved at an angle with respect to the tank bottom.
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