In method of forming a thin film by physical vapor deposition wherein a thin film material is evaporated in a vacuum thereby vapor particles deposit to a surface of a substrate and the thin film is formed, an electrode is arranged near the substrate with good conductivity and low voltage is applied between the substrate and the electrode thereby charges are induced on a growth step of the thin film being formed by the vapor particle group on the surface of the substrate, and the ionized vapor particles of the thin film material introduced in a space between the substrate and the electrode are continuously attracted and made adhere to the growth step inducing charges at low speed because of the low voltage so that the thin film is formed.Charges are induced on the growth step of the thin film by applying low voltage and the ionized vapor particles of the thin film material are subjected to the attraction of the growth step on the substrate, thereby the particles are directed to the growth step and collide with the substrate at low speed and continuously adhere to the growth step.Consequently, the thin film formed on the substrate becomes single crystal or the crystal state close to single crystal so that excellent semiconductor device or the like can be obtained.