发明授权
- 专利标题: Multilayered ceramic substrate fireable in low temperature
- 专利标题(中): 多层陶瓷基材可在低温下使用
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申请号: US375919申请日: 1989-07-06
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公开(公告)号: US5041342A公开(公告)日: 1991-08-20
- 发明人: Yuhji Umeda , Tadashi Otagiri , Go Suzuki
- 申请人: Yuhji Umeda , Tadashi Otagiri , Go Suzuki
- 申请人地址: JPX Aichi
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JPX Aichi
- 优先权: JPX63-169087 19880708; JPX63-236592 19880922
- 主分类号: C04B37/02
- IPC分类号: C04B37/02 ; H01L23/15
摘要:
In a multilayered ceramic substrate having a ceramic substrate fireable in low temperatures and a metal member for input/output brazed to the ceramic substrate, an intermediate layer including a ceramic component is arranged between the ceramic substrate and the metal member in such a manner that thermal coefficients .alpha..sub.1, .alpha..sub.2 and .alpha..sub.3 between a room temperature and near a brazing temperature of the metal member, the ceramic component in the intermediate layer and the ceramic layer, respectively, maintains a relation of .alpha..sub.1 >.alpha..sub.2 >.alpha..sub.3. Moreover, the ceramic substrate fireable in low temperatures is constructed by first ceramic layer having a flexural strength more than 25 kg/mm.sup.2 and a second ceramic layer having a dielectric constant less than 7. In these constructions, the multilayered ceramic substrate having a sufficient adhesion strength between the metal member and the ceramic substrate and a good reliability can be obtained, while advantages of the ceramic substrate fireable in low temperatures can be maintained.
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