发明授权
- 专利标题: Passivated polycrystalline semiconductors quantum well/superlattice structures fabricated thereof
- 专利标题(中): 其制造的钝化多晶半导体量子阱/超晶格结构
-
申请号: US426571申请日: 1989-10-24
-
公开(公告)号: US5051786A公开(公告)日: 1991-09-24
- 发明人: Edward H. Nicollian , Arnold Reiman , Raphael Tsu
- 申请人: Edward H. Nicollian , Arnold Reiman , Raphael Tsu
- 申请人地址: NC Research Triangle Park
- 专利权人: MCNC
- 当前专利权人: MCNC
- 当前专利权人地址: NC Research Triangle Park
- 主分类号: H01L21/324
- IPC分类号: H01L21/324 ; H01L29/15 ; H01L29/16
摘要:
The internal grain boundaries and intergranular spaces of polycrystalline semiconductor material may be passivated with an amorphous material, to substantially eliminate the dangling bonds at the internal grain boundaries. The passivated polycrystalline material of the present invention exhibits a lower electrically active defect density at the grain boundaries and intergranular space compared to unpassivated polycrystalline material. Moreover, large classes of amorphous passivating materials may be used for each known semiconductor material so that the passivating process may be readily adapted to existing process parameters and other device constraints. Passivated polycrystalline material may be employed to form the well or low energy bandgap layer of a quantum well device or superlattice, while still maintaining the required tunneling effect. By freeing quantum well devices from the requirement to use monocrystalline well material deeper wells may be produced, and a wider range of materials may be used, with high yields and low cost processes.
公开/授权文献
信息查询
IPC分类: