发明授权
- 专利标题： Semiconductor wafer orientation device
- 专利标题（中）： 半导体晶圆定位装置
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申请号： US286916申请日： 1988-12-20
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公开(公告)号： US5052886A公开(公告)日： 1991-10-01
- 发明人: Masayuki Moroi
- 申请人： Masayuki Moroi
- 申请人地址： TX Dallas
- 专利权人： Texas Instruments Incorporated
- 当前专利权人： Texas Instruments Incorporated
- 当前专利权人地址： TX Dallas
- 主分类号： H01L21/683
- IPC分类号： H01L21/683
摘要：
A device having a circled array of tapered motor driven rollers center and find the flat edge of a semiconductor wafer by rotating the wafer until the flat edge is over a photo cell, at which time finder rollers secure the wafer in its centered and orientated position.
公开/授权文献
- US06008149A Moldable composite article and method of manufacture 公开/授权日：1999-12-28
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