发明授权
- 专利标题: Permanent magnet force rebalance micro accelerometer
- 专利标题(中): 永磁力重新平衡微加速度计
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申请号: US314453申请日: 1989-02-22
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公开(公告)号: US5060039A公开(公告)日: 1991-10-22
- 发明人: Marc S. Weinberg , Paul Greiff
- 申请人: Marc S. Weinberg , Paul Greiff
- 申请人地址: MA Cambridge
- 专利权人: The Charles Stark Draper Laboratory, Inc.
- 当前专利权人: The Charles Stark Draper Laboratory, Inc.
- 当前专利权人地址: MA Cambridge
- 主分类号: G01C19/5719
- IPC分类号: G01C19/5719
摘要:
An accelerometer fabricated by micromachining techniques from a crystaline precursor. The accelerometer is formed in a body of a semiconductor crystal such as silicon by doping portions to an etch resistant condition and etching a cavity around them to release a resiliently suspended multi legged member. A conductor is formed in one of the legs. A permanent magnet is placed with opposite polarity poles on either side of the leg and the acceleration displacement of the member sensed from which a current is developed through the leg conductor to restore the member position and provide an output indication of acceleration.
公开/授权文献
- US6070914A Pipe coupling 公开/授权日:2000-06-06
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