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US5060248A Scanning analysis and imaging system with modulated electro-magnetic energy source 失效
具有调制电磁能源的扫描分析和成像系统

Scanning analysis and imaging system with modulated electro-magnetic
energy source
摘要:
A scanning spectral-analysis micro-probe subsystem, for a surface imaging system, utilizes a micro-probe to detect the precise position of a point on a sample object surface having surface dimensions changing responsive to surface absorption of incident radiation from a modulated radiation source. The modulated incident radiation causes the sample region dimensions, in the vicinity of the micro-probe, to be modulated, so that the micro-probe detects this dimensional modulation, with a detected modulation strength directly proportional to the incident radiation absorption.
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