发明授权
- 专利标题: Scanning analysis and imaging system with modulated electro-magnetic energy source
- 专利标题(中): 具有调制电磁能源的扫描分析和成像系统
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申请号: US546281申请日: 1990-06-29
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公开(公告)号: US5060248A公开(公告)日: 1991-10-22
- 发明人: Charles L. Dumoulin
- 申请人: Charles L. Dumoulin
- 申请人地址: NY Schenectady
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: NY Schenectady
- 主分类号: G01N23/06
- IPC分类号: G01N23/06 ; G01N27/00 ; G01Q90/00
摘要:
A scanning spectral-analysis micro-probe subsystem, for a surface imaging system, utilizes a micro-probe to detect the precise position of a point on a sample object surface having surface dimensions changing responsive to surface absorption of incident radiation from a modulated radiation source. The modulated incident radiation causes the sample region dimensions, in the vicinity of the micro-probe, to be modulated, so that the micro-probe detects this dimensional modulation, with a detected modulation strength directly proportional to the incident radiation absorption.
公开/授权文献
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