发明授权
- 专利标题: Surface contamination sensor
- 专利标题(中): 表面污染传感器
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申请号: US609875申请日: 1990-11-06
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公开(公告)号: US5062707A公开(公告)日: 1991-11-05
- 发明人: Steven Adler-Golden , Michael W. Matthew
- 申请人: Steven Adler-Golden , Michael W. Matthew
- 申请人地址: MA Burlington
- 专利权人: Spectral Sciences, Inc.
- 当前专利权人: Spectral Sciences, Inc.
- 当前专利权人地址: MA Burlington
- 主分类号: G01N21/62
- IPC分类号: G01N21/62 ; G01N21/94
摘要:
An ambient surface contamination sensor including a source for supplying gas, which is energized before it reaches the surface being sensed so that it is capable of transferring energy to the contaminants on the surface or vapor originating therefrom. The sensor then detects the optical emission from the gas passed over the surface within a selected wavelength band characteristic of the presence on the surface of the contaminant, and indicates the presence of the contaminant on the surface when such an emission is detected.
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