发明授权
- 专利标题： Target unit
- 专利标题（中）： 目标单位
-
申请号： US602382申请日： 1990-10-24
-
公开(公告)号： US5066381A公开(公告)日： 1991-11-19
- 发明人: Kenji Ohta , Yoshiteru Murakami , Nobuyuki Takamori , Kenichi Hijikata , Takyuki Shingyoji , Kazushige Takaishi
- 申请人： Kenji Ohta , Yoshiteru Murakami , Nobuyuki Takamori , Kenichi Hijikata , Takyuki Shingyoji , Kazushige Takaishi
- 申请人地址： JPX Osaka JPX Tokyo
- 专利权人： Sharp Kabushiki Kaisha,Mitsubishi Metal Corporation
- 当前专利权人： Sharp Kabushiki Kaisha,Mitsubishi Metal Corporation
- 当前专利权人地址： JPX Osaka JPX Tokyo
- 优先权： JPX63-93053 19880415; JPX63-93054 19880415
- 主分类号： C23C14/34
- IPC分类号： C23C14/34
摘要：
A target unit includes a backing plate and a target member disposed on the backing plate. The target member includes at least one erosion member of a sputtering material and at least one holding member for releasably holding the erosion member on the backing plate.