A method for fabricating a solid electrolytic capacitor is described, in which a solid electrolyte is made of a conductive polymer layer and is formed on a conductive inorganic layer which is formed on a metallic foil through a dielectric film. For the formation of the conductive polymer layer, while an external electrode is not directly contacted with the conductive inorganic layer, the electrolytic polymerization reaction of a polymerizable monomer in an electrolytic solution is carried out. For this purpose, the external electrode may be covered with a conductive polymer film at the contact portion. Alternatively, the external electrode may be moved from one position to another or may be kept apart from the conductive inorganic layer during the electrolytic polymerization reaction. By this, the mechanical damages of the conductive inorganic layer with the external electrode are suppressed with good electric characteristics of the capacitor.