发明授权
- 专利标题: High purity phenyl silicone ladder polymer and method for producing the same
- 专利标题(中): 高纯度苯基硅树脂聚合物及其制备方法
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申请号: US437826申请日: 1989-11-17
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公开(公告)号: US5081202A公开(公告)日: 1992-01-14
- 发明人: Hiroshi Adachi , Etsushi Adachi , Osamu Hayashi , Kazuo Okahashi
- 申请人: Hiroshi Adachi , Etsushi Adachi , Osamu Hayashi , Kazuo Okahashi
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 主分类号: C08G77/16
- IPC分类号: C08G77/16 ; C08G77/18 ; C08G77/34
摘要:
High purity phenyl silicone ladder polymer, and a method for producing such polymer, suitable for use as the protective film, the interlayer insulating film, etc. in the fabrication of semiconductor elements, which polymer contains therein 1 ppm or below of each of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following general formula (I): ##STR1## (where: R.sub.1 to R.sub.4 denote respectively hydrogen or a lower alkyl group; n is an integer of from 8 to 1,000); or the following general formula (II): ##STR2## (where: n is an integer of from 8 to 1,600).
公开/授权文献
- US5695710A Transesterified pet/pen via melt extrusion 公开/授权日:1997-12-09
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