发明授权
- 专利标题: Method for aligning thin film head pole tips
- 专利标题(中): 薄膜头极尖对齐方法
-
申请号: US609921申请日: 1990-11-06
-
公开(公告)号: US5084957A公开(公告)日: 1992-02-04
- 发明人: Nurul Amin , John Bortins , Beat G. Keel , Ying D. Yan
- 申请人: Nurul Amin , John Bortins , Beat G. Keel , Ying D. Yan
- 申请人地址: CA Scotts Valley
- 专利权人: Seagate Technology, Inc.
- 当前专利权人: Seagate Technology, Inc.
- 当前专利权人地址: CA Scotts Valley
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; G11B5/31
摘要:
A thin film magnetic read/write head is manufactured using Al.sub.2 O.sub.3 dams. The Al.sub.2 O.sub.3 dams are formed using a sacrificial layer which is deposited upon a bottom pole layer. An Al.sub.2 O.sub.3 layer is deposited over the sacrificial layer. When the sacrificial layer is removed, the Al.sub.2 O.sub.3 layer forms dams between which a top pole piece is deposited. The sacrificial layer is removed using lapping and a selected chemical etch; partial lapping or chemical etch followed by chemical etch of the sacrificial layer which lifts-off overlying Al.sub.2 O.sub.3 ; depositing photoresist dams and chemically etching the encapsulation layer and the sacrificial layer; or removal through physical or thermal shock of the Al.sub.2 O.sub.3 layer sputtered at zero bias followed by a selective chemical etch of the sacrificial layer.
公开/授权文献
- US5981621A Monomeric compositions effective as wound closure devices 公开/授权日:1999-11-09
信息查询
IPC分类: