发明授权
- 专利标题: Method for preparing superconductor sputtering target
- 专利标题(中): 制备超导体溅射靶的方法
-
申请号: US571138申请日: 1990-08-22
-
公开(公告)号: US5091221A公开(公告)日: 1992-02-25
- 发明人: Jau-Jier Chu , Ming-Chih Lai , Mei-Rurng Tseng , Huei-Hsing Yeh
- 申请人: Jau-Jier Chu , Ming-Chih Lai , Mei-Rurng Tseng , Huei-Hsing Yeh
- 申请人地址: TWX Chutung
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TWX Chutung
- 主分类号: C04B35/45
- IPC分类号: C04B35/45 ; C04B35/636 ; C23C14/34 ; H01L39/24
摘要:
A method for preparing a superconductor sputtering target is disclosed in which sputtering targets for coating superconductor films can be prepared essentially by mixing oxides (carbonates or fluorides) of metals such as Y, Ba, Cu (Bi, Pb), Sr, Ca,Cu) with the atomic ratio of individual elements be controlled in a specific range, an oxide superconductor paste being prepared by blending an organic binder and an organic solvent according to a specific solid percentage, and a metal such as aluminum being used as the substrate; by scraping with a squeegee and adjusting the distance between a stencil and the substrate such that the superconductor paste seeps through a mesh to be printed on the substrate and then dried; after scraping, screen-printing and drying having been repeated several times, the substrate being placed into an oven and heated to a temperature of 400.degree.-450.degree. C., at a rate of less than 5.degree. C./min, for 30 minutes and then cooled down to room temperature at the same rate of less than 5.degree. C./min.
公开/授权文献
- US5695527A Coil prosthetic foot 公开/授权日:1997-12-09
信息查询
IPC分类: