发明授权
- 专利标题： Production system using wafer-like carrier jig
- 专利标题（中）： 使用晶片状载体夹具的生产系统
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申请号： US231160申请日： 1988-08-11
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公开(公告)号： US5100276A公开(公告)日： 1992-03-31
- 发明人: Takemasa Iwasaki , Sadao Shimoyashiro , Haruo Ohya , Hiroshi Kikuchi , Tsutomu Takahashi , Masahiro Watanabe
- 申请人： Takemasa Iwasaki , Sadao Shimoyashiro , Haruo Ohya , Hiroshi Kikuchi , Tsutomu Takahashi , Masahiro Watanabe
- 申请人地址： JPX Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX62-199739 19870812
- 主分类号： B65G1/00
- IPC分类号： B65G1/00 ; B65G1/07 ; B65H1/28 ; H01L21/00 ; H01L21/673 ; H01L21/677
摘要：
The present invention provides a carrier jig for use in processing, transporting and stocking a wafer-like material used in manufacture processes of semiconductor products, and a semiconductor production system using the carrier jig. The carrier jig of the present invention comprises a holder for holding and storing therein one wafer, for example, and a container box for loading therein the holder. A mechanism for transferring wafers by the use of the carrier jig is provided in each process, with the result the period of production time can be shortened and the production speed can be enhanced.
公开/授权文献
- US5513898A Chair with removable armrest 公开/授权日：1996-05-07
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