发明授权
- 专利标题： Method for producing a diffraction grating in optical elements
- 专利标题（中）： 在光学元件中生产衍射光栅的方法
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申请号： US465043申请日： 1990-01-16
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公开(公告)号： US5101297A公开(公告)日： 1992-03-31
- 发明人: Toshihiko Yoshida , Osamu Yamamoto
- 申请人： Toshihiko Yoshida , Osamu Yamamoto
- 申请人地址： JPX Osaka
- 专利权人： Sharp Kabushiki Kaisha
- 当前专利权人： Sharp Kabushiki Kaisha
- 当前专利权人地址： JPX Osaka
- 优先权： JPX1-9139 19890117
- 主分类号： G02B6/12
- IPC分类号： G02B6/12 ; G02B6/124 ; G02B6/13 ; G02B6/34 ; G02F1/37 ; G03F7/00 ; H01L21/027
摘要：
A method for producing a diffraction grating in optical elements with an optical waveguide is disclosed which comprises the steps of: forming a transparent conductive film on the optical waveguide; forming an electron beam resist film on said transparent conductive film; drawing a diffraction grating pattern on said resist film with an electron beam; and developing said resist film with a diffraction grating pattern drawn thereon to form a resist film of the diffraction grating pattern.
公开/授权文献
- US5804204A Potassium salts for treatment of hypertension 公开/授权日：1998-09-08
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