发明授权
- 专利标题： Method for manufacturing a tunneling Josephson element
- 专利标题（中）： 一种制造隧道式JOSEPHSON元件的方法
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申请号： US567504申请日： 1990-08-15
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公开(公告)号： US5102862A公开(公告)日： 1992-04-07
- 发明人: Yoichi Okabe , Atsuki Inoue , Hideomi Koinuma
- 申请人： Yoichi Okabe , Atsuki Inoue , Hideomi Koinuma
- 申请人地址： JPX Tokyo
- 专利权人： The University of Tokyo
- 当前专利权人： The University of Tokyo
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX62-186751 19870728
- 主分类号： H01L39/22
- IPC分类号： H01L39/22 ; H01L39/24
摘要：
A superconductive device and method for the manufacture thereof is disclosed, having a tunneling Josephson element comprising a first oxide superconductor electrode, a blocking layer consisting of a metal substantially inert to oxygen formed on the surface of the oxide superconductor, an insulating thin film layer formed on the blocking layer, and a second superconductor electrode opposing said first electrode formed on the insulating thin film.
公开/授权文献
- US6010963A Global planarization using SOG and CMP 公开/授权日：2000-01-04
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