Invention Grant
US5112438A Photolithographic method for making helices for traveling wave tubes and other cylindrical objects 失效
用于制造行波管和其他圆柱形物体的螺旋的光刻方法

  • Patent Title: Photolithographic method for making helices for traveling wave tubes and other cylindrical objects
  • Patent Title (中): 用于制造行波管和其他圆柱形物体的螺旋的光刻方法
  • Application No.: US619541
    Application Date: 1990-11-29
  • Publication No.: US5112438A
    Publication Date: 1992-05-12
  • Inventor: Harold C. Bowers
  • Applicant: Harold C. Bowers
  • Applicant Address: CA Los Angeles
  • Assignee: Hughes Aircraft Company
  • Current Assignee: Hughes Aircraft Company
  • Current Assignee Address: CA Los Angeles
  • Main IPC: H01J23/16
  • IPC: H01J23/16
Photolithographic method for making helices for traveling wave tubes and
other cylindrical objects
Abstract:
The helix (10) of the slow wave structure of a travelling wave tube is formed on a steel mandrel (12) by depositing the metal (44) of the helix on the mandrel and then coating the deposited metal with a photo resist (46). A laser light beam (24,26), having a cross section in the form of a short line, is focused upon the resist and moved linearly along the axis of the mandrel while the mandrel is rotated. The resulting helical exposure pattern on the photo resist is developed and the remainder of the undeveloped resist is then removed to expose a helical pattern (50,52) of deposited helix metal (44). The latter is subjected to etching processes so as to remove the deposited metal between the turns of the helical resist pattern (54,56), leaving a helix (44) of deposited metal on the mandrel underneath the resist. The resist is then removed and the mandrel etched away to leave the completed helix.
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