发明授权
US5113565A Apparatus and method for inspection and alignment of semiconductor chips
and conductive lead frames
失效
半导体芯片和导电引线框架的检查和对准的装置和方法
- 专利标题: Apparatus and method for inspection and alignment of semiconductor chips and conductive lead frames
- 专利标题(中): 半导体芯片和导电引线框架的检查和对准的装置和方法
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申请号: US549577申请日: 1990-07-06
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公开(公告)号: US5113565A公开(公告)日: 1992-05-19
- 发明人: Thomas M. Cipolla , Paul W. Coteus , Glen W. Johnson , Philip Murphy , Christopher W. Oden
- 申请人: Thomas M. Cipolla , Paul W. Coteus , Glen W. Johnson , Philip Murphy , Christopher W. Oden
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corp.
- 当前专利权人: International Business Machines Corp.
- 当前专利权人地址: NY Armonk
- 主分类号: H01L21/60
- IPC分类号: H01L21/60 ; H01L21/00 ; H01L21/66 ; H01L21/68
摘要:
A method is described for aligning a contact pattern on an electronic device held by a first movable support, with a bond site pattern on a lead frame held by a second movable support. The method includes the steps of: (a) creating and storing models of a chip's contact pattern and a lead frame's bond site pattern; (b) imaging the electronic device and lead frame; (c) determining the position of contacts on said electronic device and reorienting the contact pattern model to a best fit with the imaged contact position; (d) determining the position of each bond site on the imaged lead frame and reorienting the bond site model to a best fit with the imaged bond site position; (e) determining positional differences between the reoriented lead frame and contact pattern models; and (f) generating signals to reorient the first and second movable supports to minimize the positional differences when they are moved into a bonding positon. A machine is described for performing the above method wherein each of three main movable elements of the machine is assigned a dimensional axis in which its travel is non-adjustable, so that other movable elements can be calibrated thereagainst.
公开/授权文献
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