A method and apparatus for inspecting workpieces for rapid and accurate determination of dimensions and the like. The equipment is electro-optical in nature and there is no contact between the inspecting elements and the workpiece under inspection. An electro-optical sensor is utilized which includes a light source for illuminating at least one edge of a workpiece, a lens for forming an image of the illuminated edge, and an array of photosensitive elements, such a photodiodes, capable of producing an electrical signal in response to light incident thereon. The light, including the edge image, is impinged upon the array and the electrical signals produced correspond to the portion of the edge, its shape, etc. The signals can be rapidly analyzed to provide a determination of a dimension such as length, squareness, curvature, and the like.