发明授权
- 专利标题： Zinc diffusion process
- 专利标题（中）： 锌扩散过程
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申请号： US568803申请日： 1990-08-17
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公开(公告)号： US5116781A公开(公告)日： 1992-05-26
- 发明人: John A. Agostinelli , David J. Lawrence
- 申请人： John A. Agostinelli , David J. Lawrence
- 申请人地址： NY Rochester
- 专利权人： Eastman Kodak Company
- 当前专利权人： Eastman Kodak Company
- 当前专利权人地址： NY Rochester
- 主分类号： H01L21/22
- IPC分类号： H01L21/22 ; H01L21/225 ; H01L33/00
摘要：
A process is disclosed of diffusing a zinc dopant into a III-V compound substrate. To avoid degrading the substrate surface the zinc dopant source is provided by coating an organic composition comprised of a zinc organic compound chosen from the group consisting of zinc alcoholates, .beta.-diketonate chelates and carboxylate salts. The composition inludes at least one organic film-forming moiety containing from 5 to 30 carbon atoms.
公开/授权文献
- US5548928A Door structure 公开/授权日：1996-08-27
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