发明授权
US5121634A Ultrasonic microscope 失效
超声波显微镜

Ultrasonic microscope
摘要:
An ultrasonic microscope comprises an acoustic lens for emitting an ultrasonic beam, a movable shaft for supporting a sample, and a drive circuit for moving the movable shaft and thus the sample relative to the acoustic lens in a z-direction. Two signals for eliminating x-direction and y-direction inclinations of the sample relative to the acoustic lens are supplied to the drive circuit in synchronism with an x-direction drive signal and a y-direction drive signal, so that the sample is moved in the z-direction and scanned with the ultrasonic beam in an x-y direction while the sample inclination sample to the acoustic lens is being eliminated.
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