发明授权
- 专利标题: Method of and device for diameter measurement used in automatically controlled crystal growth
- 专利标题(中): 用于自动控制晶体生长的直径测量方法和装置
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申请号: US685587申请日: 1991-03-29
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公开(公告)号: US5138179A公开(公告)日: 1992-08-11
- 发明人: Masahiko Baba , Hiroshi Ohtsuna
- 申请人: Masahiko Baba , Hiroshi Ohtsuna
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Handotai Company, Limited
- 当前专利权人: Shin-Etsu Handotai Company, Limited
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-81673 19900329
- 主分类号: C30B15/26
- IPC分类号: C30B15/26 ; G01B11/08
摘要:
Disclosed are a method of and a device for crystal diameter measurement in an apparatus for automatically controlling single crystal growth by the CZ technique. In the diameter measurement method, a growing region of a single crystal 32 is photographed by a camera 38, and an outer diamter Do of a luminous ring image 70 having a luminance above a reference value E is detected from a video signal supplied from the camera 38, the diameter Do thus detected being used for crystal diameter control. The crystal diameter measuring device comprises: a camera 38 for photographing a growing section of a single crystal 32 and supplying a video signal; devices for detecting a maximum video signal value with respect to one scanning line or more; a device for obtaining a reference value E corresponding to the above-mentioned maximum value; devices for binary-coding the video signal in comparison with the reference value E; and a device for detecting the outer diameter Do of a luminous image from a binary image obtained by the binary-coding.
公开/授权文献
- US5896096A Paging receiver and a sequential vibrating method therefor 公开/授权日:1999-04-20