发明授权
US5141460A Method of making a field emission electron source employing a diamond
coating
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制造使用金刚石涂层的场发射电子源的方法
- 专利标题: Method of making a field emission electron source employing a diamond coating
- 专利标题(中): 制造使用金刚石涂层的场发射电子源的方法
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申请号: US747563申请日: 1991-08-20
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公开(公告)号: US5141460A公开(公告)日: 1992-08-25
- 发明人: James E. Jaskie , Robert C. Kane
- 申请人: James E. Jaskie , Robert C. Kane
- 专利权人: Motorola Solutions Inc
- 当前专利权人: Motorola Solutions Inc
- 主分类号: G01Q70/08
- IPC分类号: G01Q70/08 ; G01Q70/10 ; H01J1/304 ; H01J9/02
摘要:
A field emission electron device employing an electron emitter comprised of a coating of diamond material disposed on a surface of a selectively formed conductive/semiconductive electrode and a method of forming the device including a step wherein carbon ions are implanted at a surface of a conductive/semiconductive electrode to function as nucleation sites for the diamond formation.
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