发明授权
- 专利标题: Electron microscope and method for observing microscopic image
- 专利标题(中): 电子显微镜和观察微观图像的方法
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申请号: US701090申请日: 1991-05-16
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公开(公告)号: US5153434A公开(公告)日: 1992-10-06
- 发明人: Yusuke Yajima , Masakazu Ichikawa , Mikio Ichihashi , Ryo Suzuki , Masatoshi Takeshita
- 申请人: Yusuke Yajima , Masakazu Ichikawa , Mikio Ichihashi , Ryo Suzuki , Masatoshi Takeshita
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-126785 19900518
- 主分类号: H01J37/20
- IPC分类号: H01J37/20 ; H01J37/26
摘要:
An electron microscope and a method for obtaining microscopic images whereby the intensity and distribution of the internal magnetic field of a specimen are acquired with precision. The electron microscope irradiates a focused electron beam at a target specimen and detects the transmitted beam past the specimen. The irradiated position on the specimen is selected by one of three ways: by moving the specimen alone, by deflecting the focused electron beam before it enters the specimen, or by combining these two ways. In this setup, the internal magnetic field of the specimen under its irradiated spot is known through detection of the deflection of the electron beam caused by the Lorentz force and through arithmetic processing of the detected deflection. An actuator that moves the specimen comprises a support with a hole through which the electron beam passes, a specimen stage with a like hole, a plurality of piezoelectric devices, and a structure that lets the electron beam pass therethrough. The actuator also comprises a mobile stage mounted on the support and attached to the specimen stage via the multiple piezoelectric devices, the mobile stage causing the devices to shift the support normal to the electron beam. Another component of the actuator is a stage control means for supplying a driving voltage to the multiple piezoelectric devices for their position control.
公开/授权文献
- US5743675A Underground cable anode installment system 公开/授权日:1998-04-28
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