发明授权
US5166614A Integrated-type SQUID magnetometer having a magnetic shield, and a
multichannel SQUID magnetometer using the same
失效
具有磁性屏蔽的集成式QU型磁力计,以及使用其的多通道液体磁力计
- 专利标题: Integrated-type SQUID magnetometer having a magnetic shield, and a multichannel SQUID magnetometer using the same
- 专利标题(中): 具有磁性屏蔽的集成式QU型磁力计,以及使用其的多通道液体磁力计
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申请号: US525665申请日: 1990-05-21
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公开(公告)号: US5166614A公开(公告)日: 1992-11-24
- 发明人: Koichi Yokosawa , Hideaki Nakane
- 申请人: Koichi Yokosawa , Hideaki Nakane
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX1-132413 19890525
- 主分类号: A61B5/04
- IPC分类号: A61B5/04 ; A61B5/05 ; G01R33/035 ; H01L39/22
摘要:
A pickup coil and a planar type SQUID are formed integrally on a single substrate to form a SQUID magnetometer. The SQUID is disposed on the surface of a projecting portion of the substrate and an insulating layer for spacing is laminated on the SQUID. The top, bottom and side surfaces of the assembly of the SQUID and insulating layer covering the same are all covered with a superconducting layer to form a magnetic shield for enclosing the SQUID. The magnetic shield is remote from the planar type pickup coil disposed on the remaining portion of the substrate by a distance which is equal to or greater than a length of one side of the size of the magnetic shield, thereby preventing magnetic flux distortion due to the presence of the magnetic shield from disturbing coil balance of the pickup coil.
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