发明授权
US5170241A Metal insulator semiconductor transistor having guard region and semiconductor device having the same 失效
具有保护区域的金属绝缘体半导体晶体管和具有其的半导体器件

  • 专利标题: Metal insulator semiconductor transistor having guard region and semiconductor device having the same
  • 专利标题(中): 具有保护区域的金属绝缘体半导体晶体管和具有其的半导体器件
  • 申请号: US623295
    申请日: 1990-12-06
  • 公开(公告)号: US5170241A
    公开(公告)日: 1992-12-08
  • 发明人: Kazuhiro YoshimuraShuichi Suzuki
  • 申请人: Kazuhiro YoshimuraShuichi Suzuki
  • 申请人地址: JPX Kawasaki
  • 专利权人: Fujitsu Limited
  • 当前专利权人: Fujitsu Limited
  • 当前专利权人地址: JPX Kawasaki
  • 优先权: JPX1-319826 19891208
  • 主分类号: H01L29/06
  • IPC分类号: H01L29/06 H01L29/10 H01L29/78
Metal insulator semiconductor transistor having guard region and
semiconductor device having the same
摘要:
A field effect transistor includes a semiconductor substrate having a first conduction type and functioning as a drain of the field effect transistor, and a back gate region formed in the semiconductor substrate and having a second conduction type opposite to the first conduction type. The field effect transistor also includes a source region formed in the back gate region and having the first conduction type, an insulator film formed on the semiconductor substrate and having first and second windows, and a gate electrode covered by the insulator film and located so that a channel is formed in the back gate region. Further, the field effect transistor includes a guard region formed in the semiconductor substrate and located close to the back gate region. The guard region has the second conduction type, and has a first portion located on a first side of the guard region facing the back gate region and a second portion located on a second side opposite to the first side. A first breakdown voltage obtained at a first junction between the second portion and the semiconductor substrate is lower than that obtained at a second junction between the back gate region and the semiconductor substrate. Furthermore, the field effect transistor includes an electrode formed on the insulator film and connecting the guard region and the back gate region via the first and second windows.
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