发明授权
- 专利标题: X-ray window and method of producing same
- 专利标题(中): X光窗及其生产方法
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申请号: US744332申请日: 1991-08-13
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公开(公告)号: US5173612A公开(公告)日: 1992-12-22
- 发明人: Takahiro Imai , Naoji Fujimori
- 申请人: Takahiro Imai , Naoji Fujimori
- 申请人地址: JPX Osaka
- 专利权人: Sumitomo Electric Industries Ltd.
- 当前专利权人: Sumitomo Electric Industries Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX2-249846 19900918
- 主分类号: G01T7/00
- IPC分类号: G01T7/00 ; C23C16/26 ; C23C16/27 ; G21K5/00 ; H01J35/18
摘要:
An X-ray window having a diamond X-ray transparent film, diamond reinforcing crosspieces and a substrate on which the diamond X-ray transparent film has been grown. As reinforcing crosspieces are made of diamond, no thermal stress is generated between the X-ray transparent film and the crosspieces. This mask excels in flatness, transmittance of X-rays, and strength.
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