发明授权
US5179070A Semiconductor substrate having a superconducting thin film with a buffer layer in between 失效
半导体衬底具有介于其间的缓冲层的超导薄膜

  • 专利标题: Semiconductor substrate having a superconducting thin film with a buffer layer in between
  • 专利标题(中): 半导体衬底具有介于其间的缓冲层的超导薄膜
  • 申请号: US726124
    申请日: 1991-07-02
  • 公开(公告)号: US5179070A
    公开(公告)日: 1993-01-12
  • 发明人: Keizo HaradaHideo ItozakiNaoji FujimoriShuji YazuTetsuji Jodai
  • 申请人: Keizo HaradaHideo ItozakiNaoji FujimoriShuji YazuTetsuji Jodai
  • 申请人地址: JPX
  • 专利权人: Sumitomo Electric Industries, Ltd.
  • 当前专利权人: Sumitomo Electric Industries, Ltd.
  • 当前专利权人地址: JPX
  • 优先权: JPX63-108498 19880430; JPX63-109323 19880502; JPX63-109324 19880502; JPX63-110011 19880506; JPX63-110012 19880506; JPX63-110013 19880506; JPX63-110014 19880506; JPX63-110015 19880506; JPX63-110016 19880506; JPX63-110017 19880506; JPX63-110018 19880506; JPX63-110019 19880506; JPX63-110020 19880506; JPX63-110021 19880506; JPX63-110022 19880506; JPX63-110023 19880506; JPX63-110024 19880506; JPX63-110025 19880506; JPX63-249425 19881003
  • 主分类号: H01L39/24
  • IPC分类号: H01L39/24
Semiconductor substrate having a superconducting thin film with a buffer
layer in between
摘要:
A semiconductor substrate such as silicon single crystal having a thin film of a superconducting material composed of a compound oxide whose critical temperature is higher than 30 K such as Ln.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-.delta. (Ln is Y or lanthanide), characterized in that a buffer layer composed of ZrO.sub.2, MgO containing or not containing metal element such as Ag is interposed between the semiconductor substrate and the superconducting thin film.
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