Invention Grant
- Patent Title: Conversion device for laser interferometic measuring apparatus
- Patent Title (中): 用于激光干涉仪测量装置的转换装置
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Application No.: US531040Application Date: 1990-05-31
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Publication No.: US5184313APublication Date: 1993-02-02
- Inventor: Akira Kuwabara , Yasufumi Koyama
- Applicant: Akira Kuwabara , Yasufumi Koyama
- Applicant Address: JPX
- Assignee: Dainippon Screen Mfg. Co., Ltd.
- Current Assignee: Dainippon Screen Mfg. Co., Ltd.
- Current Assignee Address: JPX
- Priority: JPX1-140100 19890531
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01D3/02 ; G01D3/036

Abstract:
An A-phase pulse (S.sub.A) and a B-phase pulse (S.sub.B) are transmitted from a laser interferometic measuring device to a conversion device (5). When the distance-to-be-measured (l) is increasing, a conversion coefficient (D.sub.R) is added to or subtracted from an initial value in an arithmetic calculator (53) at the rising edge and the trailing edge of the pulses (S.sub.A, S.sub.B). The conversion coefficient has a digital value of M-digits and represents a reference distance .lambda./N, where .lambda. is the wavelength of a laser beam (LB.sub.1, LB.sub.2) employed in the laser measuring machine and M and N are positive integers. A predetermined unit distance in the metric system corresponds to a unit number in the (M+1)-th digit. A distance pulse signal (S.sub.L) is generated in response to a carry signal and a borrow signal from the arithmetic calculator, and is used in expressing a change of the distance in the metric system.
Public/Granted literature
- US5802904A Multipart roll stand Public/Granted day:1998-09-08
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