发明授权
- 专利标题: Conversion device for laser interferometic measuring apparatus
- 专利标题(中): 用于激光干涉仪测量装置的转换装置
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申请号: US531040申请日: 1990-05-31
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公开(公告)号: US5184313A公开(公告)日: 1993-02-02
- 发明人: Akira Kuwabara , Yasufumi Koyama
- 申请人: Akira Kuwabara , Yasufumi Koyama
- 申请人地址: JPX
- 专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX1-140100 19890531
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01D3/02 ; G01D3/036
摘要:
An A-phase pulse (S.sub.A) and a B-phase pulse (S.sub.B) are transmitted from a laser interferometic measuring device to a conversion device (5). When the distance-to-be-measured (l) is increasing, a conversion coefficient (D.sub.R) is added to or subtracted from an initial value in an arithmetic calculator (53) at the rising edge and the trailing edge of the pulses (S.sub.A, S.sub.B). The conversion coefficient has a digital value of M-digits and represents a reference distance .lambda./N, where .lambda. is the wavelength of a laser beam (LB.sub.1, LB.sub.2) employed in the laser measuring machine and M and N are positive integers. A predetermined unit distance in the metric system corresponds to a unit number in the (M+1)-th digit. A distance pulse signal (S.sub.L) is generated in response to a carry signal and a borrow signal from the arithmetic calculator, and is used in expressing a change of the distance in the metric system.
公开/授权文献
- US5802904A Multipart roll stand 公开/授权日:1998-09-08
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