发明授权
US5189489A Interferometric measurement device with non stabilized light source 失效
具有非稳定光源的干涉测量装置

  • 专利标题: Interferometric measurement device with non stabilized light source
  • 专利标题(中): 具有非稳定光源的干涉测量装置
  • 申请号: US699675
    申请日: 1991-05-14
  • 公开(公告)号: US5189489A
    公开(公告)日: 1993-02-23
  • 发明人: Andrei Brunfeld
  • 申请人: Andrei Brunfeld
  • 申请人地址: ILX Jerusalem
  • 专利权人: Amsys Ltd.
  • 当前专利权人: Amsys Ltd.
  • 当前专利权人地址: ILX Jerusalem
  • 优先权: ILX94429 19900517
  • 主分类号: G01B9/02
  • IPC分类号: G01B9/02
Interferometric measurement device with non stabilized light source
摘要:
The present invention relates to a method for greatly extending the effective coherence length of non-stabilized lasers allowing one to use them in interferometers with large optical path differences. The embodiment described as an example comprises a robust Twyman-Green interferometer for accurate measurement of extended displacements.
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