发明授权
- 专利标题： Fluorine-containing polyamide acid and polyamide
- 专利标题（中）： 含氟聚酰胺酸和聚酰胺
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申请号： US609103申请日： 1990-11-05
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公开(公告)号： US5194579A公开(公告)日： 1993-03-16
- 发明人: Shunichi Numata , Kooji Fujisaki , Noriyuki Kinjo
- 申请人： Shunichi Numata , Kooji Fujisaki , Noriyuki Kinjo
- 申请人地址： JPX Tokyo JPX Tokyo
- 专利权人： Hitachi, Ltd.,Hitachi Chemical Co., Ltd.
- 当前专利权人： Hitachi, Ltd.,Hitachi Chemical Co., Ltd.
- 当前专利权人地址： JPX Tokyo JPX Tokyo
- 优先权： JPX58-62080 19830411
- 主分类号： C08G73/10
- IPC分类号： C08G73/10
摘要：
Polyimides represented by general formula (I), (wherein Ar.sub.1 and Ar.sub.2 each represents an aromatic ring-containing group, Cf represents a fluorinated alkyl group directly bonded to Ar.sub.1, and m.gtoreq.1), and polyamide acids as their percursors. The polyimides have excellent humidity resistance and heat resistance, thus being useful as coating materials for semiconductor chips and insulating films for multi-layered wiring. ##STR1##