发明授权
- 专利标题： Liquid metal ion source
- 专利标题（中）： 液态金属离子源
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申请号： US854710申请日： 1992-03-20
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公开(公告)号： US5194739A公开(公告)日： 1993-03-16
- 发明人: Keiji Sato , Yoshie Kitamura , Hiroyuki Suzuki
- 申请人： Keiji Sato , Yoshie Kitamura , Hiroyuki Suzuki
- 申请人地址： JPX Tokyo
- 专利权人： Seiko Instruments Inc.
- 当前专利权人： Seiko Instruments Inc.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX3-58996 19910322
- 主分类号： H01J27/22
- IPC分类号： H01J27/22
摘要：
A liquid metal ion source which can produce cesium ions stably for a long time in the form of a beam focussed to a micro-spot. The liquid metal ion source is composed of a reservoir containing a liquid metal, and a needle type emitter passing through the reservoir and having a sharp tip end which protrudes from the reservoir, the liquid metal being composed primarily of a cesium compound containing 0.3-20 atom % of oxygen.
公开/授权文献
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