发明授权
- 专利标题: Two-dimensional optical encoder with three gratings in each dimension
- 专利标题(中): 具有三维光栅尺的二维光编码器
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申请号: US848116申请日: 1992-03-09
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公开(公告)号: US5204524A公开(公告)日: 1993-04-20
- 发明人: Souji Ichikawa , Mikio Suzuki , Wataru Ishibashi , Shingo Kuroki
- 申请人: Souji Ichikawa , Mikio Suzuki , Wataru Ishibashi , Shingo Kuroki
- 申请人地址: JPX Tokyo
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX3-25416[U] 19910322; JPX3-43266[U]JPX 19910513
- 主分类号: G01D5/36
- IPC分类号: G01D5/36
摘要:
A first grating is formed on a main scale, and a second and third gratings on an index scale. The first grating generally assumes a cruciform shape, and consists of a grating having grating lines arranged in the X-direction and another grating having grating lines arranged in the Y-direction. The second grating is formed in a square central area of the index scale, and consists of two gratings having grating lines arranged in the X-direction and divided at the center and another two gratings having grating lines arranged in the Y-direction and divided at the center. The third grating consists of four gratings having grating lines arranged in the X-direction with different phases and another four gratings having grating lines arranged in the Y-direction with different phases. A light-emitting element and eight photodetectors that are arranged corresponding to the respective gratings of the third grating are fixed to a movable member on which the index scale is attached. Light emitted from the light-emitting element passes though the second grating, reflected by the first grating, passes through the third grating, and finally detected by the photodetectors. Alternatively, the first grating may consist of rectangular portions arranged in the X- and Y-direction in a matrix form.
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